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INF5490 - RF MEMS

Course content

The all pervasive use of wireless systems requires modules with ever increasing functionality, compactness and reduced power consumption. The performance of current RF (Radio Frequency) systems can be enhanced by replacing critical components by their micromechanical counterparts, MEMS (Micro Electro Mechanical Systems). This is a strong drive for developing RF MEMS units.

The course will start by giving an overview of typical features of RF and wireless systems and describe central steps in MEMS micro machining. The functionality, modeling and implementation issues of central RF MEMS components are described. This comprises transmission lines, phase shifters, switches, capacitances, varactors and inductors implemented by micromechanics. Special weight is laid on mechanical vibrating resonators and their use as filters and oscillators. The course concludes by giving a short overview of packaging and possibilities for monolithic integration with microelectronics, together with examples of more composite systems.

Learning outcomes

The course will give the students insight in how critical modules in wireless systems can be designed and implemented using MEMS technology, thereby making integration with microelectronics feasible. The students will get to know the fundamental and technological possibilities and constraints when designing and implementing RF MEMS subsystems.

Admission

Students at UiO must apply for courses in StudentWeb.

International applicants, if you are not already enrolled as a student at UiO, please see our information about admission requirements and procedures for international applicants.

The examination in this course is not available for external candidates. Only students admitted to the course may sit for the examination.

Prerequisites

Recommended prior knowledge

General background in microelectronics. Some physics and signal processing is advantageous. The courses INF5480 - RF-kretser, teori og design (might be taken in parallel) and FYS4230 - Modelling and design of micro- and nanosystems, are strongly recommended.

Teaching

The course is a one term course with 2 lectures and one joint group gathering each week. Two mandatory exercises are required, and the reports must be delivered before given deadlines. Matlab and the simulation package CoventorWare will be used. Rules for mandatory assignments.

Exam information

The final exam is held at the end of the term either as a written one (4 hours) or orally. The mandatory assignments must be approved prior the exam. General information about the examination.

Exam resources

Required material, if any, will be distributed at the exam.

No special exam resources are allowed.

Assessment and grading

Course grades are awarded on a descending scale using alphabetic grades from A to E for passes and F for fail. Read more about the grading system .

An external auditor regularly evaluates the academic quality of the course, including the form of exam used on the course.

Possibility of make-up exams and re-takes

This subject does not offer new examination in the beginning of the subsequent term for candidates who withdraw during an ordinary examination or fail an ordinary examination. For general information about new examination, see http://www.mn.uio.no/studier/admin/eksamen/utsatt-og-ny-eksamen/index.html and http://www.mn.uio.no/english/studies/admin/examination/retaking-examinations/

Withdrawing from exams and limits on re-takes

A student can sit for this exam up to 3 times. If a student wishes to withdraw from the exam, s/he must do this in StudentWeb at least two weeks prior to the first day of the exam. Failure to do so will be counted as one of the three opportunities to sit for the exam.

Other information

It is strongly recommended to attend the first lecture since it will be given important information.

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