FYS9230 – Modelling and Design of Micro- and Nanosystems

Schedule, syllabus and examination date

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Exams after the reopening

As a general rule, exams will be conducted without physical attendance in the autumn of 2021, even after the reopening. See the semester page for information about the form of examination in your course. See also more information about examination at the MN Faculty in 2021.

Course content

Selected examples of micro- and nanosystems and their applications will be presented: pressure sensors, accelerometers, mirror arrays and labs-on-chips. In order to prepare for designing these types of elements, the course teaches elasticity, structures, electrostatics, piezoresistivity and microfluidics. Microsystem modeling normally combines several fields of physics (multiphysics): mechanics, electromagnetism, fluid dynamics, electronics and small-scale effects like Brownian motion. Analytical models and rough estimates for the functioning of the selected systems are presented, as well as lithographic mask layers and manufacturing processes. The students will use the finite/boundary element based programs Coventorware or Comsol for designing and modeling elements themselves.

Learning outcome

The course provides a theoretical background for modeling mechanical, electromechanical, optical and fluidic microsystems, as well as examples and applications. The student will achieve experience in

  • Using design tools and commercial modeling programs for MEMS design
  • Evaluation of numerical results, and comparison with rough models
  • Reading relevant research papers

Admission to the course

PhD candidates from the University of Oslo should apply for classes and register for examinations through Studentweb.

If a course has limited intake capacity, priority will be given to PhD candidates who follow an individual education plan where this particular course is included. Some national researchers’ schools may have specific rules for ranking applicants for courses with limited intake capacity.

PhD candidates who have been admitted to another higher education institution must apply for a position as a visiting student within a given deadline.

Background (bachelor level) from physics, electronics, informatics or mechanics.


The course is a part of the "Norwegian PhD Network on Nanotechnology for Microsystems". Lectures will be given in compact form, one week in October and one week in November. Between the lecture weeks the students will work on modelling and literature study. The course includes two compulsory exercises, one design and modeling exercise, using Coventorware or Comsol, and one paper presentation.


Final oral exam.

Grading scale

Grades are awarded on a pass/fail scale. Read more about the grading system.

Resit an examination

This course offers both postponed and resit of examination. Read more:

Special examination arrangements, use of sources, explanations and appeals

See more about examinations at UiO

Last updated from FS (Common Student System) Nov. 27, 2021 7:16:00 AM

Facts about this course


If the course is offered, a minimum of four students is required for ordinary lectures to take place. If less than four students participate, an exam will be given, but one should not expect ordinary teaching.

The course is last held autumn 2020


Examination is last held autumn 2022

Teaching language