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FYS9230 - Modelling and design of micro- and nanosystems

Course content

Selected examples of micro- and nanosystems and their applications will be presented: pressure sensors, accelerometers, mirror arrays and labs-on-chips. In order to prepare for designing these types of elements, the course teaches elasticity, structures, electrostatics, piezoresistivity and microfluidics. Microsystem modeling normally combines several fields of physics (multiphysics): mechanics, electromagnetism, fluid dynamics, electronics and small-scale effects like Brownian motion. Analytical models and rough estimates for the functioning of the selected systems are presented, as well as lithographic mask layers and manufacturing processes. The students will use the finite/boundary element based programs Coventorware or Comsol for designing and modeling elements themselves.

Learning outcomes

The course provides a theoretical background for modeling mechanical, electromechanical, optical and fluidic microsystems, as well as examples and applications.
The student will achieve experience in

• Using design tools and commercial modeling programs for MEMS design
• Evaluation of numerical results, and comparison with rough models
• Reading and presenting a relevant research paper

Admission

This course is primarily intended for PhD students admitted to a program at a Norwegian University or University College. For registration please contact the student administration office in the Department of Physics. PhD students from other faculties at UiO and other universities (than Oslo) must in addition apply as a Visiting PhD Student .

Prerequisites

Recommended prior knowledge

Background (bachelor level) from physics, electronics, informatics or mechanics.

Overlap

• 10 credits with FYS4230 - Modelling and design of micro- and nanosystems
• 10 credits with TFE4225 - MEMS-design (NTNU)
• 5 credits with SEN9010 - Mechanical sensors and actuators based upon micro- and nanotechnolgies (University College of Vestfold)
• 5 credits with MEM1M 000 MEMS Design (university College of Vestfold)

Teaching

The course is a part of the “Norwegian PhD Network on Nanotechnology for Microsystems”. Lectures will be given in compact form, one week in October and one week in November. Between the lecture weeks the students will work on modelling and literature study. The course includes two compulsory exercises, one design and modeling exercise, using Coventorware or Comsol, and one paper presentation.

Exam information

Final oral exam.

Assessment and grading

Students are awarded either a passing or a failing grade. Read more about the grading system .

An external auditor regularly evaluates the academic quality of the course, including the form of exam used on the course.

Explanations and appeals

Students can request an explanation of their grades, and can also appeal against their grades or make a complaint about formal examination errors. Read more about explanations and appeals

Possibility of make-up exams and re-takes

You can usually resit an exam, but the conditions depend on whether you had a valid reason for absence from the regular exam. Read more about resitting an exam .

Exam options for students with special needs

Students may apply for access to alternative exam resources or exam forms on the basis of chronic illness and/or special needs that create a marked disadvantage to other students in the exam situation. Mothers who are breastfeeding may apply for extra time to complete the exam.

Evaluation of this course

Feedback from our students is essential to us in our efforts to ensure and further improve the high quality of our programmes and courses. As a student at the University of Oslo you will therefore be asked to participate in various types of evaluation of our courses, facilities and services. All courses are subject to continuous evaluation. At regular intervals we also ask students on a particular course to participate in a more comprehensive, in-depth evaluation of this course, a so called "periodic evaluation".

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