FYS9310 - Material science of semiconductors

Schedule, syllabus and examination date

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Course content

The preparation and processing of semiconducting in the making modern nanoelectronic devices and test structures for research is used as a framework to learn topics in materials science and covers topics from raw material purification and crystal growth to semiconductor material science issues in fresent and future ridiculously large scale integrated circuits and microsystems. Basic principles and examples from Si, Si-Ge and III-V technology: Crystal defects; Van Vechten's vacancy model, Fair's diffusion model, stacking faults and dynamics, pair production in doping, deep levels, gettering, interaction between low-energy particles and semiconducting materials, interaction of plasmas with surfaces. Experimental techniques for characterising semiconductor structures : AES, RBS, TEM, SEM, SIMS, ellipsometry, FTIR, DLTS etc. Detailed physical description of semiconductor processing: epitaxial crystal growth , MBE, MOCVD, diffusion, ion implantation, ion etching, oxidation, thin film technology, silicidation , laser treatment, micro-machining. Process integration of example technologies CMOS, MEMS. Students also pick a project/topic to be presented in the course.

Learning outcome

To form a basis for understanding the link different processing techniques and the characteristics of a semiconductor. The course will provide insight in the steps in the production of semiconductor devices. A survey of of experimental methods in physical electronics is also given. The knowledge is a common base for all students of physical electronics and simultaneously provide a link for communication with students and researches of other primary disciplines such as modern electronic engineering, nanotechnology, solid state physics and material science.

Testing of learned knowledge:

The course has graded homework.(3 compulsary) during the whole semester. The character of the home work problems will vary: some can be considered as simple tests of the students knowledge of the text book. Other problems test the student's ability to combine knowledge and formulate simple but sound scientific hypothesis considering the students background. It is natural that students at this level expand on their background as required. The students will train in problem solving which provides a help and guide for the home work. The depth of understanding and width of knowledge will also be tested (3 compulsory quick tests). The student make a literature based project during the course which will be graded where the students understanding and ability to separate essential principles from recipe details will be tested. The PhD students are expected to end at a level being able to follow and participate in a discussion with researchers on topics from the curriculum. The final exam is oral and the students that are considered good will typically be good at presenting and discuss the principles of topics, given their background, and based on the science principles explicitly being emphasized in the curriculum and lectures. Some overview is also expected.


PhD candidates from the University of Oslo should apply for classes and register for examinations through Studentweb.

If a course has limited intake capacity, priority will be given to PhD candidates who follow an individual education plan where this particular course is included. Some national researchers’ schools may have specific rules for ranking applicants for courses with limited intake capacity.

PhD candidates who have been admitted to another higher education institution must apply for a position as a visiting student within a given deadline.

Overlapping courses

10 credits overlap against FYS327.

10 credits with FYS4310 - Material science of semiconductors


One semester , 4 hours pr week divided between lectures (70%) and discussion of problems.


3 compulsory multiple choice exams (approx 4h) during the semester (approx. 6% weight). 3 compulsory graded home works (approx. 24% weight). Project work (approx. 20% weight). Final oral exam (approx. 50% weight).

Grading scale

Grades are awarded on a pass/fail scale. Read more about the grading system.

Explanations and appeals

Resit an examination

This course offers both postponed and resit of examination. Read more:

Special examination arrangements

Application form, deadline and requirements for special examination arrangements.


The course is subject to continuous evaluation. At regular intervals we also ask students to participate in a more comprehensive evaluation.

Facts about this course






Every spring

If the course is offered, a minimum of four students is required for ordinary lectures to take place. If less than four students participate, an exam will be given, but one should not expect ordinary teaching.


Every spring

Teaching language

Norwegian (English on request)