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FYS9310 - Material science of semiconductors

Course content

The preparation and processing of semiconducting in the making modern nanoelectronic devices and test structures for research is used as a framework to learn topics in materials science and covers topics from raw material purification and crystal growth to semiconductor material science issues in fresent and future ridiculously large scale integrated circuits and microsystems. Basic principles and examples from Si, Si-Ge and III-V technology: Crystal defects; Van Vechten's vacancy model, Fair's diffusion model, stacking faults and dynamics, pair production in doping, deep levels, gettering, interaction between low-energy particles and semiconducting materials, interaction of plasmas with surfaces. Experimental techniques for characterising semiconductor structures : AES, RBS, TEM, SEM, SIMS, ellipsometry, FTIR, DLTS etc. Detailed physical description of semiconductor processing: epitaxial crystal growth , MBE, MOCVD, diffusion, ion implantation, ion etching, oxidation, thin film technology, silicidation , laser treatment, micro-machining. Process integration of example technologies CMOS, MEMS. Students also pick a project/topic to be presented in the course.

Learning outcomes

To form a basis for understanding the link different processing techniques and the characteristics of a semiconductor. The course will provide insight in the steps in the production of semiconductor devices. A survey of of experimental methods in physical electronics is also given. The knowledge is a common base for all students of physical electronics and simultaneously provide a link for communication with students and researches of other primary disciplines such as modern electronic engineering, nanotechnology, solid state physics and material science.

Testing of learned knowledge:

The course has graded homework.(3 compulsary) during the whole semester. The character of the home work problems will vary: some can be considered as simple tests of the students knowledge of the text book. Other problems test the student's ability to combine knowledge and formulate simple but sound scientific hypothesis considering the students background. It is natural that students at this level expand on their background as required. The students will train in problem solving which provides a help and guide for the home work. The depth of understanding and width of knowledge will also be tested (3 compulsory quick tests). The student make a literature based project during the course which will be graded where the students understanding and ability to separate essential principles from recipe details will be tested. The PhD students are expected to end at a level being able to follow and participate in a discussion with researchers on topics from the curriculum. The final exam is oral and the students that are considered good will typically be good at presenting and discuss the principles of topics, given their background, and based on the science principles explicitly being emphasized in the curriculum and lectures. Some overview is also expected.

Admission

This course is primarily intended for PhD students admitted to a program at a Norwegian University or University College. For registration please contact the student administration office in the Department of Physics. PhD students from other faculties at UiO and other universities (than Oslo) must in addition apply as a Visiting PhD Student .

Prerequisites

Recommended prior knowledge

FYS2210 - Semiconductor components, FYS3410 - Condensed matter physics and MENA4000 - Functional materials.

Overlap

10 credits overlap against FYS327.

10 credits with FYS4310 - Material science of semiconductors

Teaching

One semester , 4 hours pr week divided between lectures (70%) and discussion of problems.

Exam information

3 compulsory multiple choice exams (approx 4h) during the semester (approx. 6% weight). 3 compulsory graded home works (approx. 24% weight). Project work (approx. 20% weight). Final oral exam (approx. 50% weight).

Assessment and grading

Students are awarded either a passing or a failing grade. Read more about the grading system .

An external auditor regularly evaluates the academic quality of the course, including the form of exam used on the course.

Explanations and appeals

Students can request an explanation of their grades, and can also appeal against their grades or make a complaint about formal examination errors. Read more about explanations and appeals

Possibility of make-up exams and re-takes

You can usually resit an exam, but the conditions depend on whether you had a valid reason for absence from the regular exam. Read more about resitting an exam .

Exam options for students with special needs

Students may apply for access to alternative exam resources or exam forms on the basis of chronic illness and/or special needs that create a marked disadvantage to other students in the exam situation. Mothers who are breastfeeding may apply for extra time to complete the exam.

Evaluation of this course

Feedback from our students is essential to us in our efforts to ensure and further improve the high quality of our programmes and courses. As a student at the University of Oslo you will therefore be asked to participate in various types of evaluation of our courses, facilities and services. All courses are subject to continuous evaluation. At regular intervals we also ask students on a particular course to participate in a more comprehensive, in-depth evaluation of this course, a so called "periodic evaluation".

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