FYS4310 – Material Science of Semiconductors

Schedule, syllabus and examination date

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Course content

The preparation and processing of semiconductors made to produce devices is used as a framework to learn topics in materials science. The framework span from raw material purification and crystal growth to rediculously large integrated circuits and microsystems. Basic principles and examples are drawn mainly from Si, Si-Ge, III-V technology: Crystal defects, Vacancy models, stacking fault creation and dynamics, pair-production of doping atoms, deep levels, defect reactions, gettering, interaction of low energetic ions with semiconductor materials. Experimental methods for semiconductor process characterization; CV, IV, SEM, SIMS,AES, STM, RBS, TEM, elipsometri,FTIR, DLTS etc Detailed physical description of semiconductor processing: epitaxial crystal growth , MBE, MOCVD, diffusion, ion implantation, ion etching, oxidation, thin film technology, silicidation , laser treatment, micro-machining. Student also pick a project/topic to be presented in the course.

Learning outcome

The knowledge is a common base for all students of physical electronics and simultaneously provide a link for communication with students and researches of other primary disciplines such as modern electronic engineering, nanotechnology, solid state physics and material science. The aim is to obtain the basis for understanding the link between different processing techniques and the characteristics of a semiconductor. The course will provide insight into some of the steps in the production of semiconductor devices. The course also provides an introduction to experimental methods that are used in parts of physical electronics and which are often used as documentation for published scientific results.

Testing of learned knowledge:

The course has graded homework. Thus the students has to learn during the whole semester. These problems will be a combination of simple calculations where the student applies the content of the book and problems where the student may combine knowledge and information in order to achieve new knowledge. The thought process is here more important than the result. The students will train in problem solving. The master students should be able to follow a discussion with researchers on topics from the curriculum. These chores and skills and absorbtion of learning goals will be tested during the course and final exam -se also bolow on exam.


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Overlapping courses

10 credits overlap with FYS9310 – Material Science of Semiconductors


One semester , 4 hours pr week divided between lectures (70%) and discussion of problems.


3 multiple choice exams during the semester (approved/not approved). 3 compulsory exercises (approx. 30% weight). Project work (approx. 20% weight). Final oral exam (approx. 50% weight).

Grading scale

Grades are awarded on a scale from A to F, where A is the best grade and F is a fail. Read more about the grading system.

Explanations and appeals

Resit an examination

This course offers both postponed and resit of examination. Read more:

Special examination arrangements

Application form, deadline and requirements for special examination arrangements.


The course is subject to continuous evaluation. At regular intervals we also ask students to participate in a more comprehensive evaluation.

Facts about this course






Every spring

If the course is offered, a minimum of four students is required for ordinary lectures to take place. If less than four students participate, an exam will be given, but one should not expect ordinary teaching.


Every spring

Teaching language