FYS4310 – Material Science of Semiconductors

Changes in the course due to coronavirus

Autumn 2020 the exams of most courses at the MN Faculty will be conducted as digital home exams or oral exams, using the normal grading scale. The semester page for your course will be updated with any changes in the form of examination.

See general guidelines for examination at the MN Faculty autumn 2020.

Course content

The preparation and processing of semiconductors made to produce devices are used as a framework to learn topics in materials science. The framework span from raw material purification and crystal growth to ridiculously large integrated circuits and microsystems. Basic principles and examples are drawn mainly from Si, Si-Ge, III-V technology: Crystal defects, Vacancy models, stacking fault creation and dynamics, pair-production of doping atoms, deep levels, defect reactions, gettering, interaction of low energetic ions with semiconductor materials. Experimental methods for semiconductor process characterization; CV, IV, SEM, SIMS, AES, STM, RBS, TEM, elipsometri, FTIR, DLTS, etc. Detailed physical description of semiconductor processing: epitaxial crystal growth, MBE, MOCVD, diffusion, ion implantation, ion etching, oxidation, thin-film technology, silicidation, laser treatment, micro-machining. Students also pick a project/topic to be presented in the course.

Learning outcome

The knowledge is a common base for all students of physical electronics and simultaneously provide a link for communication with students and researches of other primary disciplines such as modern electronic engineering, nanotechnology, solid state physics and material science. The aim is to obtain the basis for understanding the link between different processing techniques and the characteristics of a semiconductor. The course will provide insight into some of the steps in the production of semiconductor devices. The course also provides an introduction to experimental methods that are used in parts of physical electronics and which are often used as documentation for published scientific results.

Testing of learned knowledge:

The course has graded homework. Thus the students has to learn during the whole semester. These problems will be a combination of simple calculations where the student applies the content of the book and problems where the student may combine knowledge and information in order to achieve new knowledge. The thought process is here more important than the result. The students will train in problem solving. The master students should be able to follow a discussion with researchers on topics from the curriculum. These chores and skills and absorbtion of learning goals will be tested during the course and final exam -se also bolow on exam.

Admission to the course

Students admitted at UiO must apply for courses in Studentweb. Students enrolled in other Master's Degree Programmes can, on application, be admitted to the course if this is cleared by their own study programme.

Nordic citizens and applicants residing in the Nordic countries may apply to take this course as a single course student.

If you are not already enrolled as a student at UiO, please see our information about admission requirements and procedures for international applicants.

Overlapping courses


This course has 4 hours of teaching per week, divided between lectures (70%) and discussion of problems.


  • Final oral exam which counts approx 50% towards the final grade.

This course has mandatory exercises that must be approved before you can sit the final exam:

  • a 45-minute oral presentation on a given topic (approx. 20% weight) 
  • 20-minute oral presentation on a chosen topic (approx. 10% weight) 
  • a written report on a given topic (approx. 20% weight).

It will also be counted as one of the three attempts to sit the exam for this course, if you sit the exam for one of the following courses: FYS9310 – Material Science of Semiconductors

Grading scale

Grades are awarded on a scale from A to F, where A is the best grade and F is a fail. Read more about the grading system.

Resit an examination

This course offers both postponed and resit of examination. Read more:

Special examination arrangements, use of sources, explanations and appeals

See more about examinations at UiO

Last updated from FS (Common Student System) Dec. 4, 2020 9:11:55 AM

Facts about this course


If the course is offered, a minimum of four students is required for ordinary lectures to take place. If less than four students participate, an exam will be given, but one should not expect ordinary teaching.

Teaching language