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Kort om emnet

The preparation and processing of semiconducting in the making modern nanoelectronic devices and test structures for research is used as a framework to learn topics in materials science and covers topics from raw material purification and crystal growth to semiconductor material science issues in fresent and future ridiculously large scale integrated circuits and microsystems. Basic principles and examples from Si, Si-Ge and III-V technology: Crystal defects; Van Vechten's vacancy model, Fair's diffusion model, stacking faults and dynamics, pair production in doping, deep levels, gettering, interaction between low-energy particles and semiconducting materials, interaction of plasmas with surfaces. Experimental techniques for characterising semiconductor structures : AES, RBS, TEM, SEM, SIMS, ellipsometry, FTIR, DLTS etc. Detailed physical description of semiconductor processing: epitaxial crystal growth , MBE, MOCVD, diffusion, ion implantation, ion etching, oxidation, thin film technology, silicidation , laser treatment, micro-machining. Process integration of example technologies CMOS, MEMS. Students also pick a project/topic to be presented in the course.

Hva lærer du?

To form a basis for understanding the link different processing techniques and the characteristics of a semiconductor. The course will provide insight in the steps in the production of semiconductor devices. A survey of of experimental methods in physical electronics is also given. The knowledge is a common base for all students of physical electronics and simultaneously provide a link for communication with students and researches of other primary disciplines such as modern electronic engineering, nanotechnology, solid state physics and material science.

Testing of learned knowledge:

The course has graded homework.(3 compulsary) during the whole semester. The character of the home work problems will vary: some can be considered as simple tests of the students knowledge of the text book. Other problems test the student's ability to combine knowledge and formulate simple but sound scientific hypothesis considering the students background. It is natural that students at this level expand on their background as required. The students will train in problem solving which provides a help and guide for the home work. The depth of understanding and width of knowledge will also be tested (3 compulsory quick tests). The student make a literature based project during the course which will be graded where the students understanding and ability to separate essential principles from recipe details will be tested. The PhD students are expected to end at a level being able to follow and participate in a discussion with researchers on topics from the curriculum. The final exam is oral and the students that are considered good will typically be good at presenting and discuss the principles of topics, given their background, and based on the science principles explicitly being emphasized in the curriculum and lectures. Some overview is also expected.

Opptak og adgangsregulering

Ph.d.-kandidater ved UiO søker plass på undervisningen og melder seg til eksamen i Studentweb.

Hvis emnet har begrenset kapasitet, vil ph.d.-kandidater som har emnet i sin utdanningsplan ved UiO bli prioritert. Noen nasjonale forskerskoler kan ha egne regler for rangering av søkere til emner med begrenset kapasitet.

Ph.d.-kandidater som har opptak ved andre utdanningsinstitusjoner må innen angitt frist søke om hospitantplass.

Overlappende emner

10 credits overlap against FYS327.

10 credits with FYS4310 – Material Science of Semiconductors


One semester , 4 hours pr week divided between lectures (70%) and discussion of problems.


3 compulsory multiple choice exams (approx 4h) during the semester (approx. 6% weight). 3 compulsory graded home works (approx. 24% weight). Project work (approx. 20% weight). Final oral exam (approx. 50% weight).


Emnet bruker karakterskala bestått/ikke bestått. Les mer om karakterskalaen.

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Hver vår

If the course is offered, a minimum of four students is required for ordinary lectures to take place. If less than four students participate, an exam will be given, but one should not expect ordinary teaching.


Hver vår


Norsk (engelsk på forespørsel)